基于移动相位偏折术的连续镜面反射结构全场三维形貌测量
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国家自然科学基金项目(12327802)


Full-field 3D morphology measurement of continuous specular objects by translational phase measuring deflectometry
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    摘要:

    镜面反射结构的高精度全场形貌测量是众多高端制造领域中不可或缺的重要环节。为了实现镜面形貌的高精度测量,本文提出一种移动相位偏折术。以单目单屏为基础,给出了完整的条纹相位-梯度-高度关系模型,并通过表面连续性假设实现了模型中的基本约束条件;提出了一种模型参数的求解方法,解决了传统相位偏折术中存在的二义性问题,该方法能够通过显示器的任意刚体位移实现被测结构形貌及位姿的测量;通过开展一系列验证实验,分别讨论了被测表面梯度、高度变化对该方法形貌测量能力的影响,验证了方法的形貌测量综合能力。实验结果表明,在镜面反射结构形貌测量中,本文方法相较于传统方法的测量精度显著提升。

    Abstract:

    High-precision full-field morphology measurement of specular structures is an indispensable step in numerous high-end manufacturing fields. This paper proposes Translational Phase Measuring Deflectometry to achieve high-precision measurement of specular surfaces. Based on a monoscopic single-screen setup, the method establishes a complete model of the relationship between fringe phase, surface gradient, and height, and establishes basic constraints in the model through the assumption of surface continuity. A method for solving model parameters is proposed, addressing the ambiguity issue present in traditional phase measuring deflectometry. This method allows for the measurement of the morphology and pose of the structure under test through simple and arbitrary movements of the screen. A series of validation experiments are conducted to discuss the influence of surface gradient and height variation on the method's ability to measure morphology and validate its comprehensive measurement capability. Experimental results demonstrate a significant improvement in measurement accuracy compared to traditional methods in the measurement of specular structures' morphology.

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首成逸,谭新韵,孙晨*,陈巨兵.基于移动相位偏折术的连续镜面反射结构全场三维形貌测量[J].实验力学,2025,40(4):455~466

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  • 收稿日期:2024-03-19
  • 最后修改日期:2024-04-24
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  • 在线发布日期: 2025-09-29
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