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柔性基底上含过渡层纳米薄膜在双向拉伸下断裂损伤的实验研究
Experimental Study on Fracture Damage of Polyimide-supported Thin Films with a Nanometric Transition Layer under Biaxial Tension
投稿时间: 2016-11-04  最后修改时间: 2016-11-25
DOI:
中文关键词:  双向拉伸  薄膜  柔性基底  过渡层  裂纹
英文关键词:Biaxial tension  Thin film  Flexible substrate  Transition layer  Crack
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
作者单位E-mail
陈茜 天津大学 chenqian@tju.edu.cn 
李林安 天津大学 lali@tju.edu.cn 
王世斌 天津大学  
王志勇 天津大学  
李传崴 天津大学  
李荣坚 天津大学  
李腾 天津大学  
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中文摘要:
      SSIF (Soft Substrate Interlayer Film,含过渡层的柔性基底薄膜) 结构的力学性能对现代电子元器件的广泛应用至关重要,对其力学性能的深入研究变得极为迫切。本文针对SSIF结构在双向拉伸载荷下的断裂损伤进行了实验研究。对125 μm PI(Polyimide,聚酰亚胺)上沉积的不同薄膜结构进行不同加载比下的双轴拉伸实验,通过光学显微镜观察裂纹演化过程与饱和裂纹形态。根据最小应变能密度因子理论对裂纹演化的开裂角度进行了理论分析,并在不同薄膜结构和加载比下,对裂纹演化应变进行了比较。研究结果表明,在双向拉伸载荷作用下,薄膜裂纹呈现出梯形分布,裂纹演化角度与加载比、裂纹初始角度相关;一级裂纹萌生的临界应变随着加载比降低而降低,二级及以上裂纹萌生的临界应变与各级裂纹的饱和应变随加载比降低而升高;在等双轴拉伸下,过渡层、薄膜厚度相同的不同SSIF结构,一级裂纹的临界应变基本一致,二级及以上裂纹的临界应变显现明显差异。
英文摘要:
      The mechanical properties of Soft Substrate Interlayer Film (SSIF) are very important for the wide application of modern electronic components, and the study of its mechanical properties becomes very urgent. In this paper, we experimentally studied the deformation damage process of SSIF structure under biaxial tensile load.The biaxial tensile tests of 125 μm polyimide (PI) with different film structures were performed. The angle of crack evolution and saturation crack morphology was tested by means of an optical microscopy. The cracking angle of crack evolution was analyzed theoretically based on the minimum strain energy density factor theory, and the crack evolution strain was compared under different film structures and loading ratios. The results show that under the biaxial tensile load, the crack has a trapezoidal distribution, the crack evolution angle is related to the loading ratio and the initial crack angle. The critical strain of the first-level cracks initiation declines with the decrease of loading ratio. The critical strain of the cracks beside first-level and the saturation strain of the crack at all levels increase with the decrease of the loading ratio. The critical strain of the first-level cracks in the SSIF structure with the same film thickness and different film structure is nearly the same under the equi-biaxial tension, however, the the critical strain of the cracks beside first-level is totally different.
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