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| 超高压电系数二维层状ZnO?纳米片的制备与表征 |
| Preparation and characterization of two-dimensional layered ZnO nanosheets with ultra-high piezoelectric coefficient |
| 投稿时间：2023-01-29 修订日期：2023-03-05 |
| DOI： |
| 中文关键词: 化学气相沉积法 ZnO单晶微米线 超声剥离法 二维ZnO纳米片 单晶生长 压电系数d33 |
| 英文关键词:chemical vapor deposition ZnO single crystal microwire ultrasonic stripping method 2D ZnO nanosheet single crystal growth piezoelectric coefficient d33 |
| 基金项目:国家自然科学基金项目（11832016，12002295）、合肥通用机械研究院有限公司项目(2021ZKKF043)资助项目。 |
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| 中文摘要: |
| 本文首先采用化学气相沉积法合成了氧化锌(ZnO)单晶微米线，并利用扫描电子显微镜及电子背散射衍射对ZnO微米线的微观结构、晶体结构和生长取向进行表征与分析。基于上述单晶ZnO微米线，我们通过超声剥离法将其进一步剥离制备获得了厚度小于10 nm的二维纳米片。利用透射电子显微镜，我们测得了二维ZnO纳米片的形貌、晶面间距、晶面参数及生长取向，并由此确定其晶体结构。同时，我们还采用原子力显微镜表征了二维ZnO纳米片的表面形貌和层状结构，并利用压电力显微镜模块测得了纳米片振幅-偏置电压类蝴蝶曲线和d33压电系数-偏置电压滞回曲线。实验结果表明，二维ZnO纳米片具有沿厚度取向为[0001]方向生长的单晶纤锌矿结构，且为叠层状的二维材料；其有效压电系数d33最大可达到48.4 pm/V，与现有文献报道的二维ZnO有效压电系数相比，压电性能提升约为80%。 |
| 英文摘要: |
| In this paper, zinc oxide (ZnO) single crystal microwires were first synthesized by chemical vapor deposition, and the microstructure, crystal structure and growth orientation of ZnO microwires were characterized and analyzed by scanning electron microscope and electron backscattered diffraction. Based on the above single crystal ZnO microwires, we further exfoliated them by ultrasonic exfoliation to obtain two-dimensional nanosheets with a thickness less than 10 nm. Using transmission electron microscopy, we measured the morphology, crystal plane spacing, crystal plane parameters and growth orientation of two-dimensional ZnO nanosheets, and thus determined its crystal structure. At the same time, we also used the atomic force microscope to characterize the surface morphology and layered structure of the two-dimensional ZnO nanosheets, and used the piezoelectric force microscope module to measure the amplitude-bias voltage butterfly curve of the nanosheets and the d33 piezoelectric coefficient-bias voltage. The experimental results show that the two-dimensional ZnO nanosheets have a single-crystal wurtzite structure grown along the thickness orientation of [0001], and are laminated two-dimensional materials with the maximum effective piezoelectric coefficient d33 of 48.4 pm/V. The piezoelectric performance is improved by about 80% compared with the effective piezoelectric coefficient of two-dimensional ZnO reported in the existing literature. |
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