基于激光阵列的多通道微梁生化传感系统
On the Multi-Channel Micro-Cantilever Biochemical Sensing System Based on Laser Array
Received: April 11, 2017  Revised: May 15, 2017
DOI:10.7520/1001-4888-17-091
中文关键词:  微悬臂梁阵列  垂直腔面射型激光器阵列(VCSELs)  生化传感  双透镜组
英文关键词:micro-cantilever array  vertical cavity surface emitting lasers (VCSELs) array  biochemical sensing  double lens set
基金项目:
Author NameAffiliation
WU Lin* Microelectronics Packaging Research Center, The 38th Institute of China Electronics Technology Group Corporation, Hefei 230000, China 
XIA Deng-ming Microelectronics Packaging Research Center, The 38th Institute of China Electronics Technology Group Corporation, Hefei 230000, China 
QIAN Jiang-rong Microelectronics Packaging Research Center, The 38th Institute of China Electronics Technology Group Corporation, Hefei 230000, China 
CHEN Cong Microelectronics Packaging Research Center, The 38th Institute of China Electronics Technology Group Corporation, Hefei 230000, China 
WANG Lei Microelectronics Packaging Research Center, The 38th Institute of China Electronics Technology Group Corporation, Hefei 230000, China 
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中文摘要:
      针对单微悬臂梁生化检测系统中存在的温度漂移、溶液折射率变化等环境噪声影响和不能多目标检测等问题,设计制作了一种基于垂直腔面射型激光器阵列(VCSELs)的新型微悬臂梁阵列生化传感系统。利用双透镜组光路汇聚激光器阵列发出的激光束,依次照射到微悬臂梁阵列尖端进行精确定位扫描,实现了5根微悬臂梁变形信号的同步检测。该系统具有灵敏度高、一致性好、检测快速等优点。通过升降温动态实验测试,验证了该系统的稳定可靠性。上述结果为微悬臂梁阵列式生化传感技术的开展提供了一种新的方法和平台。
英文摘要:
      Aiming at environmental noise problem in single micro-cantilever biochemical detecting system, such as temperature drift and refractive index change of solution, and unable to simultaneously carry out multi target detection, a novel micro-cantilever array biochemical sensing system was designed and manufactured, based on vertical cavity surface emitting lasers (VCSELs). Laser beams generated by a laser array are converged by using double lens optical path, which successively irradiate the tip of micro cantilever array to perform accurate locating scanning. Thus, synchronization detection of 5 micro-cantilever deformation signals is realized. This system has the advantages of high sensitivity, good consistency and fast detection etc. The stability and reliability of the system are verified by dynamic heating and cooling experiment. Above results may provide a new method and platform for development of micro-cantilever array biochemical sensing technology.
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