Journal of Experiental Mechanicals

综述：微纳米尺度材料与结构的原位疲劳实验及性能研究进展

Research progress in in-situ fatigue experiment and performance of micro- and nano- scale materials and structures：a review

Received:February 14, 2023 Revised:April 03, 2023

DOI：10.7520/1001-4888-23-030

中文关键词: 微纳米尺度原位疲劳实验疲劳性能展望

英文关键词:micro/nano- scale in-situ fatigue experiments fatigue performance fatigue prospect

基金项目:国家自然科学基金面上项目(52275149, 51835003)

Author Name	Affiliation
LI Zhenkai	Shanghai Key Laboratory for Intelligent Sensing and Detection Technology, East China University of Science and Technology, Shanghai 200237, China
YAN Yabin*	Shanghai Key Laboratory for Intelligent Sensing and Detection Technology, East China University of Science and Technology, Shanghai 200237, China
XUAN Fuzhen*	Shanghai Key Laboratory for Intelligent Sensing and Detection Technology, East China University of Science and Technology, Shanghai 200237, China

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中文摘要:

随着集成电路芯片、传感器、柔性电路系统、微/纳机电系统等微机械装置向集成化和小型化不断发展,如何预测其内部微纳米尺度结构和材料的机械性能及其可靠性成为了制约上述微机械装置进一步发展和应用的关键问题之一。在这些装置的长期使役过程中,微纳米尺度材料的疲劳性能又成为了近年来人们关注的热点问题。针对上述问题,首先,调研了与微纳米尺度材料原位疲劳实验方法和疲劳性能研究有关的文献。然后,总结了微纳米尺度原位疲劳实验方法和疲劳性能的研究现状,包括含有孪晶组织金属、梯度组织或粗细晶金属以及在单轴、多轴应力状态下的金属疲劳性能研究,并归纳了微纳米尺度界面疲劳损伤行为的研究现状。最后,对微纳米尺度材料的疲劳性能研究进行了展望,提出了对未来发展方向的思考。

英文摘要:

With the development towards integration and miniaturization of micromechanical devices such as integrated circuit chips, sensors, flexible circuit systems, and micro-/nano- electromechanical systems, accurate prediction on the mechanical property and reliability of their internal micro- /nano- scale materials has become one of the key issues restricting the further application of the above-mentioned micromechanical devices. During the long-term service, the fatigue properties of micro-/nano- scale materials have become a critical issue in recent years. Firstly, the literature related to the in-situ fatigue experimental methods and fatigue properties of micro-/nano- scale materials was investigated. And then, the current research status of micro-/nano- scale fatigue experimental technology and the research status of in situ fatigue of micro-/nano- scale materials are summarized, including the study of fatigue properties of metals containing twin structure, gradient structure or coarse and fine crystal metals, and uniaxial and multiaxial stress conditions, and the research work on interface fatigue damage is also summarized. Finally, the fatigue properties of micro-/nano- scale materials are prospected, and the future development direction is proposed.

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