| 薛长国,张广平,张青川*,伍小平.一种新型微梁阵列传感器设计及实现[J].实验力学,2011,26(1):21~25 |
| 一种新型微梁阵列传感器设计及实现 |
| Design and Realization of New Optical Sequential Readout for Micro-cantilever Array |
| 投稿时间：2010-07-07 修订日期：2010-09-20 |
| DOI： |
| 中文关键词: 微机电系统 微悬臂梁阵列 生化传感器 设计与实现 |
| 英文关键词:MEMS micro-cantilever array biosensor design and realization |
| 基金项目:国家自然科学基金(批准号：10627201、10732080、10472112和20674078)资助的课题 |
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| 中文摘要: |
| 微悬臂梁传感技术是微纳传感技术研究的热点,仪器装置的研究也从单悬臂梁向微梁阵列的方向发展。本文针对间距为250μm的商品化微梁阵列,提出了一种实现对其弯曲变形的读出系统光路。利用高精度位移平台调节激光器空间位置,使光束实现微距离上平行,并分别照射在阵列梁的相邻微梁上。用位置敏感探测器对两个微悬臂梁尖端反射的激光信号进行检测,实现系统传感功能。实验验证该光路设计简单易行,针对这一方案实现了两个微梁的信号分离。在微梁上修饰对应的抗体,系统就可以对其抗原行检测。该方案对微梁多阵列传感器研制开发提出了一个新的思路。 |
| 英文摘要: |
| As an emerging hotspot of MEMS technology and NEMS sensor over past decades, the research of instrument style of micro-cantilever sensor was developed from single cantilever to one-dimensional or two-dimensional arrays. A new optical sequential readout for micro-cantilever array is presented in this paper, based on a commercialized micro-cantilever array with 250μm spacing. Using high precision two-dimensional optical displacement table to adjust the laser position and locate two laser beams on the adjacent micro-cantilever array tips as parallel beams on micro-distance, the bend of two micro-cantilevers was detected by PSD. Thus the system sensor function was realized. This optical path is easy put up in experiment verification and two signals from two micro-cantilevers can be better separated. When an antibody was immobilized on the surface of a micro-cantilever, the system can detect the antigen in solution. This method provided a simple way to design micro-cantilever array based on optical lever in the future. |
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