| 邬林,吴定强,张青川*.基于光学读出的微悬臂梁温度传感器研制[J].实验力学,2012,27(6):696~702 |
| 基于光学读出的微悬臂梁温度传感器研制 |
| Development of a Microcantilever Temperature Sensor Based on Optical Readout |
| 投稿时间：2011-03-05 修订日期：2012-07-15 |
| DOI： |
| 中文关键词: 微悬臂梁 温度传感器 光杠杆 高分辨率 热应力 |
| 英文关键词:microcantilever temperature sensor optical lever high-resolution thermal stress |
| 基金项目:国家自然科学基金(批准号：11127201、11072233)资助的课题 |
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| 中文摘要: |
| 为实现对环境温度的高分辨率、快速、准确测量，设计制作了一种基于光学读出的微悬臂梁温度传感器。由于组成微悬臂梁的两种材料--金和氮化硅热膨胀系数的差异，在温度变化时,梁内部会产生热应力导致其弯曲变形。不同温度下梁的弯曲变形量不同，利用光杠杆方法检测出此变形，经标定后就能实现环境温度的准确测量。实验中设定系统光臂长度为25mm，采用商业化三角形微悬臂梁(长200μm、宽40μm、氮化硅层厚0.6μm，金层厚60nm)对传感器进行了测试，实验结果显示其测量重复性好，温度分辨率达到0.02℃。对于特定尺寸的微悬臂梁，通过优化其双材料厚度比，温度分辨率可达10-4℃，可用于环境温度的精密测量。 |
| 英文摘要: |
| In order to realize rapid，precise and high-resolution measurement of ambient temperature, a microcantilever temperature sensor was self-designed and manufactured based on optical readout. The bending deformation of microcantilever caused by internal thermal stress variation along with temperature due to the thermal expansion coefficient of two materials-gold and silicon nitride. Then, temperature can be accurately measured by calibrating the cantilever deflection based on optical lever method. In experiment, a commercially available triangular microcantilever was tested (Its parameters: length 200μm, width 40μm, 0.6μm thickness of SiNx, and 0.06μm thickness of Au). Experimental results show that the sensor presents good measurement repeatability; its temperature resolution reaches 20mK, when 25mm length of optical arm was set. For a particular microcantilever size, the temperature resolution can be as high as 0.01mK by optimizing bi-material thickness ratio, which can be used for precise temperature measurement. |
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