| 王竹林,雷振坤*,赵燕茹.高频光栅节距误差的采样云纹法分析[J].实验力学,2013,28(2):158~165 |
| 高频光栅节距误差的采样云纹法分析 |
| Pitch Error Analysis of High-frequency Grating based on Sampling Moiré Method |
| 投稿时间：2012-09-12 修订日期：2012-12-05 |
| DOI：10.7520/1001-4888-12-113 |
| 中文关键词: 高频光栅 节距误差 采样云纹法 |
| 英文关键词:high-frequency grating pitch error sampling Moiré method |
| 基金项目:国家自然科学基金(10972047, 11172054, 11062007)、中央高校基本科研业务费(DUT11LK03)资助 |
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| 中文摘要: |
| 使用采样云纹法来研究高频光栅节距的畸变程度。用电子束刻蚀的3922 line/mm的平行光栅,对其高分辨率扫描电镜图像进行采样和相移分析,得到对应的相位分布,进而转化为相对误差。对于正交光栅,分别进行水平和垂直方向线性滤波后转化为对应的平行光栅,进而得到相对误差分布,并提出误差统计分析来评价光栅质量。理论和实验验证表明采样云纹法可为高频光栅提供评价手段。 |
| 英文摘要: |
| Sampling Moiré method was adopted to study the pitch error of high-frequency grating with 3922 line/mm etched by electron beam. Sampling and phase-shift analysis were carried out for its high-resolution scanning electron microscopy images to obtain corresponding phase distribution. Then the relative pitch error for the grating was determined from the phase. For orthogonal grid, a linear filtering operation along horizontal and vertical directions was implemented respectively to obtain the corresponding parallel gratings. A confidence analysis was proposed to evaluate the grating quality. Simulation and experiment show that the sampling Moiré method can be used to evaluate the quality of high-frequency grating. |
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