| 房尚强,张永胜,李伟,徐敬超,缪泓*,曾毅*.一种高精度EBSD花样的标定校正方法[J].实验力学,2019,34(6):935~944 |
| 一种高精度EBSD花样的标定校正方法 |
| A high-precision calibration correction method for EBSD pattern |
| 投稿时间：2019-03-15 修订日期：2019-04-26 |
| DOI：10.7520/1001-4888-19-302 |
| 中文关键词: EBSD系统 强弱边界 标定校正 菊池极中心点 |
| 英文关键词:EBSD system strong and weak boundary calibration correction center of kikuchi pole |
| 基金项目:国家自然科学基金项目(11732009，11890683)，中国科学院仪器研制重点项目(GJHZ1721),中央高校基本科研业务费专项资金资助(WK2480000004) |
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| 中文摘要: |
| 电子背散射衍射(Electron Backscattered Diffraction，简称EBSD)系统作为一个安装在扫描电镜上的重要附件，可以获得晶粒尺寸、相组成、取向以及织构等微观信息，其核心环节是从衍射花样中获得相应晶体信息，这依赖于系统的花样标定算法。现有商用EBSD系统标定算法基于Hough变换实现衍射花样标定，其角度误差在10%左右。为提高标定精度，本文提出了一种高精度EBSD花样的标定校正方法：先基于梯度分析获得菊池带的强弱边界位置，再利用菊池极的旋转对称性特征对弱边界位置进行校正，完成整个标定校正过程。实验验证阶段，本文对单晶硅标准样品进行分析，基于梯度分析得到菊池带的强弱边界位置，与理论值作对比得出角度误差在2%~8%，比商用算法已有较大提升；再经弱边界校正，完成标定宽度的校正。与之前相比，校正后的标定算法能够不同程度地减少10%~90%的宽度标定误差，验证了本文所提出方法的可行性和可靠性。 |
| 英文摘要: |
| Electron Backscattered Diffraction (EBSD) system, serving as an important accessory mounted on a scanning electron microscope, can obtain microscopic information such as grain size, phase composition, orientation and texture. The core part of EBSD system is to obtain the corresponding crystal information from the diffraction pattern, depending on the pattern calibration algorithm of the system. The commercial EBSD system calibration algorithm is developed based on the Hough transform to achieve diffraction pattern calibration, whose angular error is about 10%. In order to improve the calibration accuracy, this work proposes a calibration correction method for high-precision EBSD patterns. First, the strong and weak boundary positions of the Kikuchi bands can be obtained based on gradient analysis. Then the rotational symmetry of the Kikuchi pole is used to correct the weak boundary position and complete the entire calibration process. In the experimental verification stage, this work analyzes the single crystal silicon standard sample. The strong and weak boundary positions of the Kikuchi bands can be obtained based on gradient analysis with the angle error of between 2% and 8% compared with the theoretical value, which is much higher than that of the commercial algorithm. After the weak boundary correction, the calibration width is corrected. Compared with previous algorithms, the corrected calibration algorithm can reduce the width calibration error by 10%~90%, which verifies the feasibility and reliability of the proposed method. |
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