| 罗克演,周士潮,陈巨兵,马沁巍,马少鹏*.基于投影CCD云纹的大视场高分辨形貌测量方法[J].实验力学,2022,37(6):784~794 |
| 基于投影CCD云纹的大视场高分辨形貌测量方法 |
| Large field of view high resolution topography measurement method based on projection CCD moiré |
| 投稿时间：2021-12-27 修订日期：2022-01-16 |
| DOI：10.7520/1001-4888-21-305 |
| 中文关键词: 投影栅线测量 CCD云纹 大视场 形貌测量 高分辨率 |
| 英文关键词:projection grid measurement CCD moiré large field of view topography measurement high resolution |
| 基金项目:国家自然科学基金(11727801， 11772053)资助 |
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| 中文摘要: |
| 基于投影三角法的光学形貌测量系统存在测量分辨率和观测视场的矛盾，限制了其在大视场高分辨形貌测量中的应用。针对这一问题，本文将CCD云纹引入投影形貌测量中，即将CCD靶面的周期性结构作为参考栅，将投射到试件表面的超密栅线“放大”为粗条纹后采集并解析，基于此发展了适用于大视场高分辨形貌测量的投影CCD云纹方法。用标准平板测量实验对投影CCD云纹法与传统投影云纹法的测量效果进行了比较，结果表明投影CCD云纹法测量分辨率与投影云纹法相当，但实验布置更为简单。用标准平板和球形物体形貌测量实验对比了投影CCD云纹法和投影栅线法的测量效果，结果表明在测量分辨率相近的情况下，投影CCD云纹法具有更大的观测视场。相对于投影栅线法，投影CCD云纹法无需增加或改动实验硬件，即可大大提高密栅线的分辨能力，因此可实现大视场高分辨形貌测量。 |
| 英文摘要: |
| The optical profile measurement system based on projection triangulation has a contradiction between the measurement resolution and the observation field of view, which limits its application of high resolution profile measurement in large field of view. In response to this problem, this paper introduced CCD moiré into the projection profile measurement, that is, the periodic structure of the CCD target surface was used as a reference grid, and the ultra-dense grid line projected on the surface of the specimen was “enlarged” into thick stripes, and then collected and analyzed. Based on this, a projection CCD moiré method suitable for large field of view and high-resolution topography measurement was developed. The measurement results of the projection CCD moiré method and the traditional projection moiré method were compared with the standard flat panel measurement experiment. The results show that the measurement resolution of the projection CCD moiré method is equivalent to that of the projection moiré method, but the experimental arrangement is simpler. The measurement results of the projection CCD moiré method and the projection grid method were compared with standard flat plate and spherical object shape measurement experiments. The results show that the projection CCD moiré method has a larger observation field when the measurement resolution is similar. Compared with the projection grid method, the projection CCD moiré method can greatly improve the resolution of the dense grid line without adding or changing the experimental hardware, so it can realize the large field of view and high-resolution topography measurement. |
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