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综述:微纳米尺度材料与结构的原位疲劳实验及性能研究进展*
Research Progress in In situ Fatigue Experiment and Performance of Micro- and Nano- scale Materials and Structures:a review
投稿时间:2023-02-14  修订日期:2023-04-03
DOI:
中文关键词:  微纳尺度  原位疲劳实验  疲劳性能  疲劳展望
英文关键词:Micro/nano-scale  In situ fatigue experiments  Fatigue performance  Fatigue prospect
基金项目:国家自然科学基金项目(面上项目,重点项目,重大项目)
作者单位邮编
李振凯 华东理工大学上海市智能感知与检测技术重点实验室 200237
闫亚宾* 华东理工大学上海市智能感知与检测技术重点实验室 200237
轩福贞 华东理工大学 200237
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中文摘要:
      随着集成电路芯片、传感器、柔性电路系统、微/纳机电系统等微机械装置向集成化和小型化的不断发展,如何预测其内部微纳米尺度结构和材料的机械性能及其可靠性成为了制约上述微机械装置进一步发展和应用的关键问题之一。特别的,在这些装置的长期使役过程中,微纳米尺度材料的疲劳性能又成为了近年来人们关注的热点问题。通过对微纳米尺度材料与结构的原位疲劳实验及性能进行的研究调查,总结了微纳米尺度原位疲劳实验技术和材料性能的研究现状,其中包括含有孪晶组织金属、梯度组织或粗细晶金属以及在单轴、多轴应力状态下的金属疲劳性能研究,并归纳了微纳米尺度界面疲劳损伤行为的研究现状。最后,对微纳米尺度材料的疲劳性能研究进行了展望,提出了对未来发展方向的思考。
英文摘要:
      With the development towards integration and miniaturization of micromechanical devices such as integrated circuit chips, sensors, flexible circuit systems, and micro/nano-electromechanical systems, accurate prediction on the mechanical property and reliability of their internal micro- and nano-scale materials has become one of the key issues restricting the further application of the above-mentioned micromechanical devices. In particular, during the long-term service, the fatigue properties of micro- and nano-scale materials have become a critical issue in recent years. Through the research and investigation of the in situ fatigue experiment and performance of micro-/nano- scale materials and structures, the current research status of micro-/nano- scale fatigue experimental technology and the research status of in situ fatigue of micro-/nano- scale materials are summarized, including the study of fatigue properties of metals containing twin structure, gradient structure or coarse and fine crystal metals, and uniaxial and multiaxial stress conditions, and the research work on interface fatigue damage is also summarized. Finally, the research on fatigue properties of micro- and nano- scale materials is prospected, and the future development direction is proposed.
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