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基于磁控溅射的散斑制备方法
Speckle manufacturing method based on magnetron sputter-ing
投稿时间:2023-10-09  修订日期:2023-11-07
DOI:
中文关键词:  数字图像相关  散斑  磁控溅射。
英文关键词:DIC  Speckle  Magnetron sputtering
基金项目:
作者单位邮编
董海斌 中国科学院工程热物理研究所 100190
郑会龙* 中国科学院工程热物理研究所 100190
张中亚 中国科学院工程热物理研究所 100190
欧阳凌峰 中国科学院工程热物理研究所 100190
张燕燕 中国科学院工程热物理研究所 100190
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中文摘要:
      为突破传统随机散斑制作方法的局限,提出了一种基于磁控溅射的散斑制备方法。通过在低气压和电磁场环境下完成对散斑材料的沉积实现散斑的制作。制斑过程中通过表面处理保证散斑与基底的结合力,通过在磁控溅射散斑过程中加入掩膜实现对散斑图案的有效控制,通过材料选择提升散斑图像的对比度。制作了氧化锆(YSZ)散斑、二硫化钼(MoS2)散斑并进行了质量评价。结果表明二硫化钼散斑和氧化锆散斑具有较高质量,将两种散斑应用于平移实验和拉伸实验,DIC测量后均表现出良好的应变测量结果。
英文摘要:
      In order to break through the limitations of traditional speckle fabrication methods, this paper studies the combination of Physical vapor deposition and speckle fabrication methods, and proposes a high-quality speckle fabrication method based on magnetron sputtering. The speckle material is deposited under Low-pressure area and electromagnetic field environment to realize the speckle fabrication. During the speckle making process, surface treatment is used to ensure the adhesion between the speckle and the substrate. By adding a mask during the magnetron sputtering speckle process, effective control of the speckle pattern is achieved, and the contrast of the speckle image is improved through material selection. YSZ speckle and MoS2 speckle were produced for quality evaluation and experimental verification. The results showed that YSZ speckle and MoS2 speckle have high quality and exhibit good accuracy and accuracy in displacement and strain measurement using DIC.
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