柔性膜基结构的应力光学系数测量研究
Study on stress optic coefficient measurement of flexible membrane based structures
Received:October 04, 2022  Revised:November 13, 2022
DOI:10.7520/1001-4888-22-247
中文关键词:  膜基结构  光弹性  应力光学系数;内应力
英文关键词:film-substrate structure  photo-elasticity  stress optical effect  internal stress
基金项目:国家自然科学基金项目(12041201)
Author NameAffiliation
XING Wenhui Department of Mechanical, Tianjin University, Tianjin 300350, China 
WU Zhipeng Institute of Optoelectronic Technology, Chinese Academy of Sciences, Chengdu 610041, Sichuan, China 
SUN Xin Department of Mechanical, Tianjin University, Tianjin 300350, China 
WANG Zhiyong* Department of Mechanical, Tianjin University, Tianjin 300350, China 
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中文摘要:
      柔性膜基结构具有轻质化、可折叠、便携等优点,在微机电和柔性电子等前沿领域有广阔的应用前景。相比于传统的刚性结构,柔性膜基结构在制备和随后服役的过程中更容易产生内应力,造成元器件稳定的降低,因此膜基结构的应力测量具有非常重要的意义。本文基于光弹性原理,设计搭建了圆偏振光场下的光弹性实验光路,分别测得了基底和膜基结构在不同应力下的光弹性图像。根据光弹性图像随应力的周期性亮暗变化规律,对图像亮度与所受应力大小进行三角函数拟合,通过拟合结果和所建立的图像亮度与主应力模型对聚酰亚胺基底和金属铜薄膜的应力光学系数进行计算,结果证明了金属铜薄膜具有应力光学效应以及通过透射的方法测量纳米级金属薄膜应力光学系数的可行性。
英文摘要:
      Flexible membrane-based structures have the advantages of lightness, foldability, portability, etc., and have broad application prospects in many frontier fields. In comparison to traditional rigid structures, flexible membrane-based structures are more likely to generate internal stress and reduce the stability of components during fabrication and subsequent use, thus making stress measurement of membrane-based structures is of great significance. This paper designs and constructs a photoelastic experimental optical path under circularly polarized light field, and records the photoelastic images of substrate and membrane base structures under various stresses, based on the principle of photoelasticity. The periodic brightening and dimming of a photoelastic image with stress can be fitted using a trigonometric function. This established model of image brightness and principal stress was then used to calculate the stress optical coefficients of the polyimide substrate and copper film, thus confirming that copper films possess a stress optical effect and that the stress optical coefficient of nanoscale metal films can be measured using a transmission method.
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